[4] When mixed with HCl, exchange of halogen atoms between molecules is catalysed, and POCl3, POCl2F, and POF3 end up in the mixture.

HCl can end up in the product due to the starting materials, or contamination by water, and must be removed if POF2Cl is to be stored.

[4] Phosphoric chloride difluoride can be made by the reaction of liquid phosphorus pentachloride with phosphorodifluoridic acid HPO2F2 or diphosphoridic tetrafluoride P2O3F4.

The POF2Cl bubbles off as a gas, and can be condensed by cooling with dry ice-acetone mixture.

[2] Other less efficient methods involve fluorinating POCl3 using fluoride salts like SbF3 or NaF.