At standard temperature and pressure, trifluorosilane is a colorless gas.

Trifluorosilane has been purified and separated by low-temperature high-vacuum distillation.

One preparation method involves products of the reaction between SbF3 and HSiCl3.

[2] HSiCl3 is obtained by copper catalyzed reaction between HCl and Silicon at 200-400 °C.

[3] The electric dipole moment of trifluorosilane is 1.26 debye.